Find a university to explore its courses and reviews.
Introduces advanced technologies that enable integration of micro-sensors and micromechanical components on the same chip to produce miniature devices called micro electromechanical systems (MEMS). The course covers physical principles and design rules that govern the performance of a device at small length scales. Discuss a large set of microfabrication techniques including photolithography, material removal processes, and additive technologies. Discuss the applications of MEMS devices in automotive, communication, energy, and BioMEMS in biomedical applications.
No one has reviewed this course yet. Share your experience and help future students know what to expect.
Anonymous · no account needed · 10 seconds